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Some of the most toxic and corrosive gases produced are used in the manufacturing of semiconductor devices. Applied Technology Specialists can assist you in choosing the best abatement technology for your process recipes. One of the staff members and a founder is the inventor of the most widely used exhaust gas abatement system used in the history of the semiconductor industry. Toxic gas abatement can prove to be very maintenance intensive if not set up and monitored. Inefficient and outdated technology can cause reduced productivity as well as putting the safety of both people and facilities at risk. Several semiconductor fabrication facility fires have been caused by toxic gas abatement equipment and the dangerous gases used in the fabrication processes. The staff at Applied Technology Specialists is imminently qualified to aid in the proper selection of abatement equipment for both VOCs and toxic gases used in the semiconductor industry. For process gas point-of-use equipment please go to the pouseries page.
Hardware
- Low NOx burners
- Flameless incineration
- Reactive scrubbers
- Polymer absorption
- Selective catalytic reaction
- Catalytic VOC oxidizers
- Halogen scrubbers
- Air Monitoring Systems
- Specialized Pollution Control Systems including Class 1, Division 1, Groups E, F & G applications
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