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The EcoGuard POU is straight forward state of the art process gas abatement system. Designed around modular technology, the system is easily configured to meet almost any semiconductor process gas exhaust needs with minimal costs. Systems as small as single input processors that can be used for exhaust flows up to 50 l/min and larger systems to handle up to 650 l/min hydrogen equivalent heat load from up to four individual process gas tools. Unlike many existing point of use abatement systems, the EcoGuard can process exhaust streams that produce large quantities of solids as reaction products of abatement oxidization and no dangerous by-pass functions are needed with the EcoGuard design. Tungsten deposition process equipment exhaust is a good example of one of these problem exhausts but the EcoGuard will handle it with ease.

The EcoGuard POU is also easy to expand and can be equipped with a water scrubber if needed. Another example is a system to process reactor exhausts that contain large quantities of Hydrogen, Arsine and Phosphine. This difficult exhaust composition produce a large heat load, water soluble as well as water insoluble solids when the exhaust is oxidized. Arsenic and Phosphorus compounds cannot be exhausted into the environment and any post abatement filtering cannot be degraded by the presence of water droplets that will quickly render high performance filter membranes useless. This system is designed to be a complete solution for this type of exhaust.

Modular technology allows easy configuration of the system to fit needs and space restrictions.

The EcoGuard POU series uses a modular approach for the monitoring and control system as well. A rugged programmable logic controller (PLC) and touch screen operator interface are used. Easy networking is provided by adding a communication module for either Ethernet or Profibus protocols. All electronic components are DIN rail mounted making any service fast and easy.

The EcoGuard POU series has been designed to use a fuel on demand technology where only a pilot flame consumes a small quantity of fuel until the process equipment is operated and the oxidizer module for that exhaust line is activated and when the process run is complete, the oxidizer returns to its low fuel consumption mode. In some cases direct ignition eliminates the need for a pilot altogether.

If you want to know more, we have provided a brochure in PDF for downloading and you can always contact us by phone, Fax, or email.

Introducing the EcoGuard POU Abatement System

EcoGuard Brochure